Some Formal Aspects of Tedmon’s Kinetics: Growth and Sublimation of Ge3N4

Abstract

The work considers the formal kinetics of growth of a scale with its simultaneous sublimation.
The basis of the model is the power (parabolic, cubic) law of the mass gain of
system “metal (alloy) – scale”, with the input of an additional parameter – rectilinear
constant of the speed of the process. The gained equations are used to describe the
growth of Ge3N4 on the surface of monocrystalline germanium in humid ammonia with simultaneous sublimation of nitride.